晶体生长器,单晶生长器;
The drawback of rotary piston vacuum pump in the vacuum system of Czochralski ( CZ) crystal grower is analyzed.
分析了采用滑阀式真空泵直拉单晶炉真空系统的缺点;
Application of Liquid Ring Vacuum Pump in Czochralski Crystal Grower
水环式真空泵在直拉单晶炉上的应用
The obturation of vacuum in the crystal grower is one of the most important factors to judge the equipment capability. The ability to move air through plant canopies is related directly to the tightness of the green house.
单晶炉炉室真空密闭性能是衡量单晶炉设备性能好坏的重要因素。空气通过植物冠层移动的能力直接与温室的密闭程度有关。
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